ホロー陰極型電極によるヘリウム大気圧グロー放電の生成

概要

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In this report, experimental results on the generation of atmospheric pressure helium glow discharge and its fundamental properties are presented. Hollow cathode type electrodes system, 0.5mm in diameter and 3.0mm in length of cylindrical hollow made of brass is tested to generate micro plasma in the mode of glow discharge. Breakdown voltages were measured as a function of helium gas pressure up to 120kPa and compared with the results in air. In the case of helium, dc voltages less than 1kV can generate glow discharges in the hollow cathode. Current-voltage characteristic obtained showed two regions with property of negative differential resistance, due to the hollow cathode effect at low pressure and developing to normal glow mode at about atmospheric pressure. Using appearances of optical emission at cathode end changed with discharge current, normal glow current density calculated of 21 μ A/cm-2/Torr-2 were qualitatively in good agreement with other authors' reports.
呉工業高等専門学校の論文