太陽電池用シリコン多結晶中の析出物が微結晶形成に及ぼす影響

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概要

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• We investigated the relationship between the formation of small grains and distribution of precipitates such as Si_3N_4 and SiON in a multicrystalline silicon ingot grown by the unidirectional solidification method. Si_3N_4 precipitate was mainly observed inside the small grain region, while SiON was mainly precipitated outside there. We found that SiON started to precipitate prior to formation of Si_3N_4 precipitates. Therefore, precipitation of SiON prior to precipitation of Si_3N_4 plays a key role in the formation of small grains.

• Research Institute for Applied Mechanics, Kyushu Universityの論文
• 2009-03-00

著者

• 松尾 整

  九州大学応用力学研究所

関連論文

• 03aC14 一方向凝固多結晶シリコンのラマン散乱による応力解析(結晶評価・その場観察(2),第36回結晶成長国内会議)
• 太陽電池用シリコン多結晶中の析出物が微結晶形成に及ぼす影響

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