同軸対称鏡型 AES-EELS 同時計数装置(ALECS)の開発

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概要

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• We have attempted to develop a new electron-electron coincidence apparatus for Auger and energy-loss electron coincidence spectroscopy (ALECS). It consists of an axially symmetric mirror electron energy analyzer (ASMA), a miniature double-pass cylindrical mirror electron energy analyzer(DPCMA)and a miniature time-of-flight mass spectrometer(TOF-MS)on a Conflat flange with a tilt-adjustment mechanism. A sample surface was irradiated by electron beam,and emitted electrons were energy-analyzed and detected by the ASMA and the DPCMA. Electron-energy-loss-spectroscopy (EELS) spectra of Ni metal were measured for preliminarily checking performance of the electron energy analyzers. It is observed that the measured weight in reflected EELS spectra of Ni core-levels is shifted to the higher loss-energy side than that evaluated from XPS data.

• 2013-02-14

著者

• 梁瀬 虹太朗

  群馬大教育

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