Microstructure formation during the annealing of iron nitrides
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概要
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The thermal metastability of iron nitride was exploited to fabricate thin-film microstructures applicable to left-handed metamaterials. A granular thin film containing dispersed iron particles was prepared by post-annealing an rf-sputter-deposited Fe0.5Al0.5N thin film with a wurtzite-type structure in a nitrogen atmosphere at 450℃. The obtained samples showed magnetic resonance in the microwave region. Laser direct writing was also applied in a nitrogen atmosphere to an rf-sputter-deposited Fe0.7Al0.3N thin film. 200 μm-wide, 300 Ωcm iron metal lines were drawn in a host nitride film of approximately 2 kΩcm. Combining and optimizing the above negative permeability and permittivity values should provide left-handed materials with a negative refractive index.
著者
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鱒渕 友治
北大院工
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Masubuchi Yuji
Graduate School Of Engineering Hokkaido Univ. Sapporo 060-8628 Jpn
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鱒渕 友治
北海道大学工学研究院物質化学部門
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