スロット型リジターノコイルを用いたＥＣＲプラズマＣＶＤによるカーボン膜の作成
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概要
- 論文の詳細を見る
Measurements are performed in an attempt to produce an ECR plasma of hydrogen and methane with a slotted Lisitano coil at high pressures, and then, to form carbon films on silicon wafers. It is shown that plasma parameters are radially uniform at pressures below 10 mTorr. The analysis of the films, performed by Raman scattering, X-ray diffraction, and so on, demonstrates that an ECR plasma produced with a slotted Lisitano coil is available for plasma CVD.
- 九州大学大学院総合理工学研究科,Interdisciplinary Graduate School of Engineering Sciences, Kyushu Universityの論文
- 1990-12-01