Model for Deposition of Thin Films in Plasma CVD
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概要
- 論文の詳細を見る
- 北海道大学 = Hokkaido Universityの論文
- 1993-10-29
著者
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Fujita I
Department Of Pediatrics Faculty Of Medicine Saga University
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Yamashina Toshiro
Dept. of Nuclear Engineering, Hokkaido Univ
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Hino T
Hokkaido Univ. Sapporo Jpn
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