S115011 PBII&D法により成膜したDLC膜の摩擦特性におよぼす加熱処理の影響([S11501]トライボロジーの基礎と応用(1))

概要

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Diamond-like carbon films have excellent tribological properties, such as high mechanical hardness, high wear resistance and low friction. DLC films have amorphous structure, which are generally composed of hydrogen and carbon. The sp2 and sp3 bonds structure brings extraordinary tribological properties. It is known that structure change of DLC films is occurred by heating. We focus on the effect of pre-heat treatment on wear property of hydrogenated DLC films and discuss about the structure change of the films. Ball on disk test after pre-heat treatment is employed. Then the structure of DLC films is measured by micro laser Raman spectroscopy. As the result, wear and frictional properties are improved by heating up to 500-C. Friction coefficient of as-deposited DLC films indicates about 0.15. On the other hands, the films heated at 500-C indicate about 0.05. From result of Raman spectroscopy, G peak position shift toward higher wave number and half band width of G band shift toward lower wave number with the increase in pre-heating temperature. From these results, it will be considered that hydrogen evolution occur and induce the graphitization of the films. Low friction coefficient of pre-heated DLC would be caused by the graphitization of DLC films because the graphite layer on the top of the films will induce lower shearing resistance at the sliding interface.
一般社団法人日本機械学会の論文
2011-09-11