J081033 薄膜熱電対を用いたPEFC内温度場測定([J08103]燃料電池(3))

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概要

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• In order to understand water behavior inside polymer electrolyte fuel cell (PEFC), we measured temperature distribution in the cell because the water behavior is impacted largely local temperature. We developed Au-Ni thin film thermocouples fabricated on parylene (poly-para-xylene) layer for measuring the internal temperature distribution of PEFC. This thermocouple was fabricated using micro-electro-mechanical-systems (MEMS) technology. Sputtering technique was employed to deposit a 1pm thick layer of Au-Ni thin film thermocouples on 2p.m thick parylene. Parylene was deposited on 4-inch silicon wafer. Then, the Au-Ni thin film thermocouples were covered with a 2pm parylene layer using deposition apparatus to protect them from environmental degradation. Fabricated thin film thermocouples embedded between the MEA (Membrane Electrode Assembly) and the GDL (Gas Diffusion Layer). The measurement result showed that temperature at cathode catalyst layer was higher than that anode catalyst layer. Insulation of thin film thermocouples has done well. It is necessary to optimize the thermocouples for precise measurement. In order to accurately measure the temperature, it is necessary to optimize the device.

• 2011-09-11

著者

• 荒木 拓人

  横浜国立大学

• 宍戸 達哉

  横浜国立大学大学院工学府

• 遠藤 亮将

  横浜国立大学大学院工学府:(現)三菱重工業株式会社

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