220304 透明導電酸化膜における機械的損傷蓄積のAE法を用いた評価(OS16 東京ブロック・山梨ブロック共同企画機械工学が支援する微細加工技術(半導体・MEMS・NEMS)1(半導体・MEMS・NEMS),オーガナイズド・セッション)

概要

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In this study, tensile tests of transparent conductive oxide (TCO) deposited on polyerhylene naphthalate (PEN) films (TCO + PEN films) used in dye-sensitized solar cells (DSCs) were carried out. In order to discriminate AE signals in TCO from PEN films, PEN film specimens (TCO was removed by 17.5% acidum hydrechloricum) were also prepared. It was found from tensile tests that many AE signals were detected in TCO + PEN films, while few AE signals were detected in PEN films. On the other hand, the electric resistance of TCO was also measured during tensile tests. These results suggested that the critical damage in TCO was detected by the measurement of AE signals more sensitively than the electric resistance measurement. To identify AE sources, in-situ observation of specimen during tensile test with AE measurement was carried out. It was emphasized that AE behavior shows good agreement with the cracking behavior in TCO. Damages in TCO under mechanical strain were successfully monitored by AE technique in the present study. Consequently, it was suggested that AE technique could be a powerful technique for evaluating the damage accumulation process in DSCs.
一般社団法人日本機械学会の論文
2011-03-17