22aHA-1 Initial Oxidation Stages of HF-passivated Si(100) : Evaluated by Carrier Lifetime, Workfunction and XPS measurements
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概要
- 論文の詳細を見る
- 2011-08-24
著者
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Franco Jr.
Isir Osaka University
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FRANCO Jr.
ISIR, Osaka University
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KIM Woo-Byoung
ISIR, Osaka University
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KOBAYASHI Hikaru
ISIR, Osaka University
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Kim Woo-byoung
Isir Osaka University
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Kobayashi Hikaru
Isir Osaka University
関連論文
- 26pTH-1 Stability of Nitric Acid Oxidized Silicon Wafers Evaluated by Microwave Photoconductance Decay Spectroscopy
- 22aHA-1 Initial Oxidation Stages of HF-passivated Si(100) : Evaluated by Carrier Lifetime, Workfunction and XPS measurements