26pTH-1 Stability of Nitric Acid Oxidized Silicon Wafers Evaluated by Microwave Photoconductance Decay Spectroscopy

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概要

• 論文の詳細を見る
• 2011-03-03

著者

• Franco Jr.

  Isir Osaka University

• FRANCO Jr.

  ISIR, Osaka University

関連論文

• 26pTH-1 Stability of Nitric Acid Oxidized Silicon Wafers Evaluated by Microwave Photoconductance Decay Spectroscopy
• 22aHA-1 Initial Oxidation Stages of HF-passivated Si(100) : Evaluated by Carrier Lifetime, Workfunction and XPS measurements

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