715 MEMS-BASED EVENT-DRIVEN ON/OFF THERMOMETER FOR ANIMAL-HEALTH MONITORING APPLICATION
スポンサーリンク
概要
- 論文の詳細を見る
With rapidly growing threatens of bird flu and other diseases, there are strong interests in developing battery-free high-sensitivity thermometer for application in wireless sensor network-based animal-health monitoring system. We proposed new 3-D bimorph structure that enables passively digital sensing actuated by event-driven on/off mechanism. Tens and more such 3-D bimorphs are fabricated on a common substrate forming a micro thermometer. The array configuration potentially could have the sensitivity of 0.1℃ and even better. It also enables high fabrication yield and makes the package simplified. This paper would present the fabrication details and the related experimental results.
- 2010-08-27
著者
-
Okada H.
Research Information Center, Institute of Plasma Physics, Nagoya University
-
KOBAYASHI T.
Research Center for Materials Science at Extreme Conditions, Osaka University
-
ITOH T.
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
-
Ikehara T.
Research Center For Ubiquitous Mems And Micro Engineering (umemsme) National Institute Of Advanced I
-
Zhang Y.
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced
-
Maeda R.
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced
関連論文
- Computational Study on Excitation. Propagation, and 3Ω_0-Heating due to the Ion Bernstein Wave
- Pressure Induced Superconductivity in Some Simple Systems
- Oxygen Plasma Activated Silicon Direct Bonding in PECVD Mode
- Neutron Beam Hardening with Heavy Water
- Dosimetry of Epithermal Neutron Field on Heavy Water Neutron Irradiation Facility of the Kyoto University Reactor (KUR)
- 715 MEMS-BASED EVENT-DRIVEN ON/OFF THERMOMETER FOR ANIMAL-HEALTH MONITORING APPLICATION
- Scalp distribution of the attenuated EEG rhythmic activities for dissimilar and/or moving images in binocular vision
- Difference of EEG spectral powers observed between binocular rivalry and binocular fusion
- OBSERVATION OF FREE-STREAMING OF ELECTRON IN PLASMAS