Oxygen Plasma Activated Silicon Direct Bonding in PECVD Mode
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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Howlader M.
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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KIM T.
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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ITOH T.
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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SUGA T.
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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Kim T.
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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Suga T.
Research Center For Advanced Science And Technology (rcast) The University Of Tokyo
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