S0401-2-1 SKH51材に被覆したDLC薄膜の密着性評価([S0401-2]表面改質および薄膜コーティング(2))

概要

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Diamond-like carbon (DLC) thin film has weakness for poor coherence to steel. Generally, interlayer such as Si, Cr and Ti used for improvement of coherence. The study improves coherence by treating with Fine Particle Bombardment (FPB) process to surface of base metal. FPB process using Si based shot particles. To transfer Si component to surface of base metal and to make patterned indented surface by FPB process. The improvement of coherence is attempted by those effects. Measuring ingredient amount of Si component remaining on surface of base metal and surface roughness FPB processed test piece. The influence that they exerted on coherence was examined. Coherence is tested by scratch test. In the result, FPB process is considered has effect on a level with interlayer.
一般社団法人日本機械学会の論文
2010-09-04