T0302-1-4 Statistical Evaluation of Fracture and Fatigue Behavior of Polysilicon Thin Films with Arbitrary Shapes

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概要

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• This paper presents the evaluation of strength distribution and fatigue behavior of polycrystalline silicon specimens with two different shapes of notches under monotonically increasing and cyclic loading. Static strength distribution was described by Weibull distribution with the two material parameters m and σ_0. The fatigue crack extension process determining fatigue lifetime was formulated by the well-known Paris law with two unknown parameters n and C. These were fit to the results of the tensile static and fatigue tests. It was found that the parameters were independent of the shapes of specimens under the same environment.

• 一般社団法人日本機械学会の論文
• 2010-09-04

著者

• Huy Vu

  名工大院

• Gaspar Joao

  フライブルク大

• Paul Oliver

  フライブルク大

• Kamiya Shoji

  名工大

• Huy Vu

  Nagoya Institute Of Technology

• Paul Oliver

  Department Of Microsystems Engineering(imtek) University Of Freiburg

• Gaspar Joao

  Department of Microsystems Engineering(IMTEK), University of Freiburg

• Gaspar Joao

  Department Of Microsystems Engineering(imtek) University Of Freiburg

• PAUL Oliver

  Department of Microsystems Engineering (IMTEK),University of Freiburg

関連論文

• J0103-2-4 ポリシリコン薄膜の疲労挙動の評価(電子情報機器,電子デバイスの強度・信頼性評価と熱制御(2))
• T0302-1-4 Statistical Evaluation of Fracture and Fatigue Behavior of Polysilicon Thin Films with Arbitrary Shapes
• Statistical Characterization of Fracture Strength and Fatigue Lifetime of Polysilicon Thin Films with Different Stress Concentration Fields

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