J0103-2-4 ポリシリコン薄膜の疲労挙動の評価(電子情報機器,電子デバイスの強度・信頼性評価と熱制御(2))

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概要

• 論文の詳細を見る

• This paper presents the possibility of fatigue lifetime prediction of polycrystalline silicon films under cyclic loading. Fatigue crack extension process determining fatigue lifetime was formulated by the well-known Paris law with two unknown parameters. These parameters were fit to the results of the tensile fatigue tests performed on specimens with three different conditions of etching damage. The optimum values and the average values of them were applied to predict fatigue lifetime distribution, which showed that fatigue behavior of polysilicon can be approximately estimated with common values of two unknown parameters of the Paris law.

• 社団法人日本機械学会の論文
• 2009-09-12

著者

• Huy Vu

  名工大院

• Kawai Taku

  名工大院

• Gaspar Joao

  フライブルク大

• Paul Oliver

  フライブルク大

• Kamiya Shoji

  名工大

関連論文

• J0103-2-4 ポリシリコン薄膜の疲労挙動の評価(電子情報機器,電子デバイスの強度・信頼性評価と熱制御(2))
• T0302-1-4 Statistical Evaluation of Fracture and Fatigue Behavior of Polysilicon Thin Films with Arbitrary Shapes

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