1112 マイクロLIF法を用いた壁面に付着した微小液滴の3次元形状計測(2)(OS11-3 ナノ・マイクロフルイディクス(マイクロ混相流),OS11 ナノ・マイクロフルイディクス,オーガナイズドセッション)

概要

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This paper describes a novel measurement technique for three dimensional shape of micro droplet utilizing micro LIF (Laser Induced Fluorescence) technique. A measurement system consisted of microscope equipped with 10x lens, high sensitive CCD camera, CW Nd:YAG laser, optical filters and so on. Calibration curve between thickness of micro droplet and emission of fluorescence dye solution was obtained by the use of the PDMS microchip, whose depth varied from 8 to 120μm fabricated using photo lithography technique. The calibration method provides high measurement accuracy and free from photo breaching. Measurement accuracy of the present method in depth direction was about 2μm assessed using laser displace meter and the spatial resolution in the x-y plane became 6.7μm. The technique is useful to investigate a two phase flow in micro scale.
2007-11-17