1110 熱型マイクロ壁面せん断応力センサの動特性評価方法の開発(2)(OS11-2 ナノ・マイクロフルイディクス(マイクロポンプ・センサー),OS11 ナノ・マイクロフルイディクス,オーガナイズドセッション)

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This paper reports an evaluation method on dynamic characteristic of thermal micro wall shear stress sensor. The sensor used in the present study is two-element type of Micro Flow Sensor (MFS). The sensors with four different shapes and two operation modes were tested. The channel is 1 and 2 mm in height and 30 mm in width. The pulsating flow in the channel was generated by a speaker, and the wall shear stress was measured by MFS and micro manometer. Inertia force in the pulsating flow with higher frequency includes the velocity delay near the wall. By compensating the velocity delay of pulsating flow, the measurement results by MFS agreed with the theoretical model. It is confirmed that MFS has a dynamic response up to 60 Hz at least and different dynamic characteristics depending on operation mode.
2007-11-17