OS0521 純チタン基板上に水熱合成したBNT膜の密着強さ(微視構造を有する材料の変形と破壊,オーガナイズドセッション)

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Lead-free piezoelectric (Bi_<1/2>Na_<1/2>)TiO_3 (BNT) films were deposited on 1 mm thick pure titanium(Ti) substrates by a hydrothermal method. Tensile tests were performed to quantitatively assess the adhesion strength between BNT films and Ti substrates. Ti substrates were pretreated by chemical polish and mechanical polish respectively prior to BNT film deposition, hi the tensile test, the behavior of film exfoliation was investigated by the replica method. The critical substrate strain inducing film exfoliation was determined by the aid of finite element analysis (FEM). In this study, the results revealed that BNT film exfoliations were caused by the strain of Ti substrate, and the mechanical polish pretreatment improved the adhesion of BNT film.
2009-07-24