P-PRE-03 Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-shaped Thin Film Mirror(MM/Micro/Nano Precision Equipments,Technical Program of Poster Session)
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概要
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This paper describes the principle and basic characteristics of a new optical MEMS switch using a belt-shaped thin film mirror. The thin film mirror between the two substrates is deformed and driven by electrostatic force. The effect of the design parameters of the switch on the minimum driving voltage is examined.
- 一般社団法人日本機械学会の論文
- 2009-06-17
著者
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Sato Kaiji
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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Okutsu Kazutoshi
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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Sato Kaiji
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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Matsumoto Yuuki
Department of Mechano-Micro Engneering, Interdisciplinary Graduate School of Science and Engineering
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Matsumoto Yuuki
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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SATO KAIJI
Department of Anatomy Kurume University School of Medicine
関連論文
- PRE-04 Driving Characteristic of an optical MEMS Switch Using a Belt-shaped Thin Film Mirror and a High Dielectric Constant Layer(MM/Micro/Nano Precision Equipments II,Technical Program of Oral Presentations)
- P-PRE-03 Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-shaped Thin Film Mirror(MM/Micro/Nano Precision Equipments,Technical Program of Poster Session)
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