PRE-04 Driving Characteristic of an optical MEMS Switch Using a Belt-shaped Thin Film Mirror and a High Dielectric Constant Layer(MM/Micro/Nano Precision Equipments II,Technical Program of Oral Presentations)
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概要
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The authors have studied the new optical MEMS switch using a belt-shaped thin film mirror. This paper describes the reduction of the driving voltage of the optical switch. For the reduction, the thin film mirror and the high dielectric constant material were used and the suitable driving signal input was examined.
- 一般社団法人日本機械学会の論文
- 2009-06-17
著者
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Nishimura Masahiko
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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Okutsu Kazutoshi
Department of Mechano-Micro Engneering, Interdisciplinary Graduate School of Science and Engineering
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Sato Kaiji
Department of Mechano-Micro Engneering, Interdisciplinary Graduate School of Science and Engineering
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Sato Kaiji
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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Okutsu Kazutoshi
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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Okutsu Kazutoshi
Department Of Mechano-micro Engneering Interdisciplinary Graduate School Of Science And Engineering
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SATO KAIJI
Department of Anatomy Kurume University School of Medicine
関連論文
- PRE-04 Driving Characteristic of an optical MEMS Switch Using a Belt-shaped Thin Film Mirror and a High Dielectric Constant Layer(MM/Micro/Nano Precision Equipments II,Technical Program of Oral Presentations)
- P-PRE-03 Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-shaped Thin Film Mirror(MM/Micro/Nano Precision Equipments,Technical Program of Poster Session)
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