WS-01 SCIENCE IN MEMS : A PLENTY OF ROOM FOR MULTIDISCIPLINARY RESEARCH(For a construction of future technology-From "micro-nano" to "intelligence"-,Workshop)
スポンサーリンク
概要
- 論文の詳細を見る
Textbooks and common sense still have to be rewritten in MEMS areas, because knowledge is not matured in micro/nano science. Examples are presented in wet etching of silicon and fracture of silicon microstructures. It is argued that interdisciplinary research collaboration is quite effective and essential for solving such problems.
- 2009-06-17
著者
関連論文
- WS-01 SCIENCE IN MEMS : A PLENTY OF ROOM FOR MULTIDISCIPLINARY RESEARCH(For a construction of future technology-From "micro-nano" to "intelligence"-,Workshop)
- Development of Self-vibration/detection AFM Probe Using Quartz Tuning fork
- Operation of S-shaped Film Actuator in Liquid Environment
- An Electrostatic Valve that Works in Higher than Atmospheric Gas Pressure
- Effect of Potassium Ion on Anisotropy of TMAH (特集:立体的微細加工)