A22 Development of ordered nano structure surface by using nano plastic forming(M4 processes and micro-manufacturing for science)
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概要
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The authors propose a new nano fabrication process by using nano plastic forming in this paper. The proposed process consists of nano plastic forming, coating and polishing. In the first step, diamond tool is imprinted onto a soda glass substrate. And array of nano grooves are fabricated. Then, the fabricated glass is coated with nickel or aluminum by vapor deposition. Finally, the coated layer is removed by polishing. Through these processes, the array of metallic nano lines can be fabricated on the surface of glass substrate. In this study, the feasibility of the proposed process was confirmed by the experiment.
- 一般社団法人日本機械学会の論文
- 2009-12-01
著者
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Yoshino Masahiko
Department Of Mechanical And Control Engineering Tokyo Institute Of Technology
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Osawa Hiroki
Department Of Mechanical And Control Engineering Tokyo Institute Of Technology
関連論文
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- A22 Development of ordered nano structure surface by using nano plastic forming(M4 processes and micro-manufacturing for science)
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- A23 Fundamental Study for Development of Metallic Functional Material by Nano/micro Plastic Forming(M4 processes and micro-manufacturing for science)
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