GLE-09 EVALUATION OF SURFACE DURABILITY OF DLC FILMS DEPOSITED BY UBM SPUTTERING(GEAR LUBRICATION AND EFFICIENCY)
スポンサーリンク
概要
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DLC films have attracted considerable attention for its excellent mechanical and tribological properties such as low friction cofficient, high wear resistance, and high hardness. DLC films are expected using in tribological and protective applications and improve the robustness and sustainability of machine elements. However, adhesion of DLC films is weak because these are consisted of stable C bond and have large residual stresses in themselves. Therefore, DLC films cannot be used in strict condition and these are not adopted in major machine elements such as gears and bearings. Adhesion of DLC films were evaluated by adhesion energy equation proposed in our previous study. And these films were tested in high surface pressure, and the surface durability of films was evaluated. structures of films were designed and optimized from these results. Films using in the test were deposited by Unbalanced Magnetron Sputtering with various conditions. As Young's modulus of films decreased, adhesion increased and hardness decreased. Wear resistance seemed to decrease with hardness decreasing. Therefore, both adhesion and wear resistance had to be considered into development of DLC films.
- 一般社団法人日本機械学会の論文
- 2009-05-13
著者
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NAKAMURA Morimasa
Department of Mechanical and System Engineering, Kyoto Institute of Technology
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MORIWAKI Ichiro
Department of Mechanical and System Engineering, Kyoto Institute of Technology
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Moriwaki Ichiro
Department Of Mechanical And System Engineering Kyoto Institute Of Technology
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Moriwaki Ichiro
Department Of Mechanical & System Engineering Kyoto Institute Of Technology
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Nakamura Morimasa
Department Of Mechanical And System Engineering Kyoto Institute Of Technology
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Miura Ken'ichi
Technology Research Institute Of Osaka Prefecture
関連論文
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