Prospects of Vertical and Smooth Etching of Thick Silicon Oxide for Opto-Electronics Integration

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概要

• 論文の詳細を見る
• 静岡大学の論文

著者

• Dutta Achyut

  Opto-electronics Research Laboratories Nec Corporation

関連論文

• Electron Spectroscopy for Chemical Analysis Study on Influence of Polymerization on Anisotropic Etching of Thick Silicon Oxide Using C_2F_6 Based ECM-RIBE
• Prospects of Vertical and Smooth Etching of Thick Silicon Oxide for Opto-Electronics Integration
• Side Wall Roughness Reduction in Deep Silicon Oxide Etching Using C_2F_6 Based ECR-RIBE

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