417 スピンオフにおけるナノPFPE潤滑膜の分子レオロジーに関する研究(T03-4 マイクロナノ理工学:nmからmmまでのテクスチャリングの創成と機能(4),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Experiments were conducted under a constant spinning speed of 10,000 rpm by using a 3.5 inch disk. Film thickness was measured with an ellipsometer. The initial film thickness was set to about 2.4 nm for all the experiments while temperature was changed in a wide range. The deflection of the rheological behavior from that of the continuum was found and a novel model based on the Fick's law of diffusion was proposed. The theoretical prediction was compared with the experimental results and a good agreement was obtained, verifying the effectiveness of the model.
一般社団法人日本機械学会の論文
2008-08-02