3414 厚肉細管内面の精密磁気研磨(S48 砥粒加工,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Clean pipes are used for high purity gas and liquid piping system by industry related to the semiconductor etc. When a high-pressure liquid was transported, thick tubing (10mm in the outside diameter and about 1 mm in the inside diameter) are used. A highly accurate internal surface finishing is necessary for this thick tubing for the adhesion and the stay prevention of the pollutant. However, an appropriate finishing technology is not found now. In this research, the magnetic field assisted machining process was applied to the inner surface finishing of a slender thick tubing (9mm in the outside diameter and 1.6mm in the inside diameter), and its finishing realization was examined experimentally. As a result, it was confirmed to be able to achieve the processing. The finishing characteristics and the finishing mechanism were clarified when the magnetic particles was used. In addition, it was clarified that there was a problem in the finishing efficiency by use of the magnetic particles.
2008-08-02