129 磁気を利用した微細溝の精密研磨技術に関する研究(OS-15 研磨技術)

概要

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Microfluidics implemented on microchips, such as those used for miniaturization of chemical and biochemical analysis systems, deal with the behavior, precise control, and manipulation of very small amounts of sample and reagent. The channels of these devices must consist of micro grooves with smoothly finished surfaces to achieve the precise control of the fluids. The difficulty in finishing is increased with the increase in depth of the groove. Therefore, development of a new finishing technology is demanded to reply to this need. This paper studies the finishing characteristic of a magnetic field assisted finishing process applied to the bottom surfaces of grooves generated on glass microchips. The experiments demonstrate the effects of the type of abrasive slurry on the finishing characteristics and propose conditions required to finish the entire groove.
一般社団法人日本機械学会の論文
2006-11-24