短パルスUVレーザによる結晶加工の基礎検討
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概要
- 論文の詳細を見る
Laser processing by using of UV pulsed laser was carried out on polyimide, acrylic resin, sapphire and diamond in order to understand the fundamental laser processing. The shapes of holes drilled on the surface of the samples by the UV laser are discussed as being related to the laser beam profile. The laser was irradiated on the surface of the each sample under conditions of both several position apart from the position of minimum laser beam diameter and several shots.
- 福井工業大学の論文