誘導結合型高周波放電におけるワークコイルからの放射電力に関する理論的研究

概要

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A inductively or capacitively coupled radio frequency discharge is being applied to the plasma CVD etc. In the inductively coupled r.f. discharge, a high-frequency work coil of several turns is wound around cylindrical discharge tube. Experimentally, it is generating plasma using r.f. generator that the frequency is 13.5MHz. As for this frequency , the nature as the microwave is remarkable. Therefore, the work coil is thought of as being a kind of antenna. In this paper, it is reporting finding supplied electric power expression theoretically using Poynting vector from the work coil.
福井工業大学の論文