A Ta_2O_5 Solid-electrolyte Switch with Improved Reliability(Session3: Emerging Devices I)
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概要
- 論文の詳細を見る
We present a novel solid-electrolyte switch ("NanoBridge") promising for application to field programmable gate array (FPGA). We replaced a previous solid electrolyte of Cu_2S with Ta_2O_5, which is compatible with a Si process. By using Ta_2O_5, we successfully controlled the turn-on voltage to adapt to CMOS operation. Furthermore, we examined the ON-state reliability of the Ta_2O_5-NanoBridge and found a trade-off between turn-off current and ON-state reliability, both of which depended on the ON conductance. By optimizing the ON conductance, NanoBridge using Ta_2O_5 achieved high durability against current (0.2mA, 105℃, 10 years) and fair turn-off current (5mA). NanoBridge can thus meet the requirements for FPGA applications.
- 2008-07-02
著者
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Aono Masakazu
Icorp/japan Science And Technology Agency
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Fujieda Shinji
Nano Electronics Research Laboratories Nec Corporation
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Aono M
Inst. Of Physical And Chemical Res. Wako Jpn
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Terabe Kazuya
National Institute For Materials Science
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Aono M
Physical And Chemical Res. (riken) Saitama
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Banno Naoki
Device Platforms Research Laboratories Nec Corporation:japan Science And Technology Agency
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Iguchi Noriyuki
Nano Electronics Research Laboratories Nec Corporation:japan Science And Technology Agency
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Sakamoto Toshitsugu
Device Platforms Research Laboratories Nec Corporation:japan Science And Technology Agency
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Hasegawa Tsuyoshi
National Institute For Materials Science
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Aono Masakazu
The Institute Of Physical And Chemical Research (riken):department Of Precision Science And Technolo
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Aono Masakazu
National Institute For Researches In Inorganic Materials
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Aono Masakazu
Aono Atomcraft Project Erato Jrdc:surface And Interface Laboratory The Institute Of Physical And Che
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TERABE Kazuya
International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Scien
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HASEGAWA Tsuyoshi
International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Scien
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AONO Masakazu
International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Scien
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Aono Masakazu
The Institute Of Physical And Chemical Research (riken):department Of Precision Science And Technolo
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- A Ta_2O_5 Solid-electrolyte Switch with Improved Reliability(Session3: Emerging Devices I)
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