A Ta_2O_5 Solid-electrolyte Switch with Improved Reliability(Session3: Emerging Devices I)

概要

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We present a novel solid-electrolyte switch ("NanoBridge") promising for application to field programmable gate array (FPGA). We replaced a previous solid electrolyte of Cu_2S with Ta_2O_5, which is compatible with a Si process. By using Ta_2O_5, we successfully controlled the turn-on voltage to adapt to CMOS operation. Furthermore, we examined the ON-state reliability of the Ta_2O_5-NanoBridge and found a trade-off between turn-off current and ON-state reliability, both of which depended on the ON conductance. By optimizing the ON conductance, NanoBridge using Ta_2O_5 achieved high durability against current (0.2mA, 105℃, 10 years) and fair turn-off current (5mA). NanoBridge can thus meet the requirements for FPGA applications.
2008-07-02