高分解能RBS分析装置の散乱角度自在機構の評価

概要

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A new high resolution RBS (HRBS) system consisting of a magnetic spectrometer and a compact vertical small accelerator is developed. A detection angle change mechanism rotating around Y axis combined a spectrometer, a measurement chamber, a goniometer and a detection chamber is newly designed and installed. In order to evaluate stability and repeatability of a detection angle change mechanism, Si element peak edge channel on a position sensitive detector is measured by using ion beam. Edge position repeatability less than 1 channel for atomic level surface characterization has been performed.
2008-08-25