Replication of Fluorinated Polyimide Film Using Quartz Glass Mold : Instrumentation, Measurement, and Fabrication Technology

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概要

• 論文の詳細を見る

• A replication process using a quartz glass mold was demonstrated using a fluorinated polyimide. The replicated fluorinated polyimide film was separated from the mold by soaking in distilled water. The film separation with a slow and then successive fast steps was due to the displacement of the weak adhesive layer by water and release of stress at the interface, respectively. Lowering the curing temperature of the fluorinated polyimide, which formed the weak adhesive layer at the interface, improved separation without chipping of the stripes of the quartz glass mold.

• 社団法人応用物理学会の論文
• 2002-10-01

著者

• Shioda Tsuyoshi

  Functional Materials Laboratory Mitsui Chemicals Inc.

• Shinoda Tsuyoshi

  Functional Materials Laboratory, Mitsui Chemicals, Inc.

関連論文

• Influence of Water Sorption on Fluorinated Polyimide Waveguide
• Polarization Dependence of Mach-Zehnder Interferometer Switch Using Fluorinated Polyimide Waveguide
• Fluorinated Polyimide Waveguide Fabricated Using Replication Process with Antisticking Layer
• Replication of Fluorinated Polyimide Film Using Quartz Glass Mold : Instrumentation, Measurement, and Fabrication Technology
• Polarization Dependence of Mach-Zehnder Interferometer Switch Using Fluorinated Polyimide Waveguide

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