Fluorinated Polyimide Waveguide Fabricated Using Replication Process with Antisticking Layer

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概要

• 論文の詳細を見る

• A new replication process with an antisticking layer was demonstrated using a fluorinated polyimide. A thin silicon-oxide coating was introduced on the top of the mold as the antisticking layer, which could significantly improve the separation between the mold and the fluorinated polyimide film without degrading the optical property. A stripe with the height and width less than 50μm was completely replicated into a fluorinated polyimide film with an accuracy of less than 1μm. A single-and a multimode waveguide film were fabricated using a cladding film with grooves formed by our replication process. The multimode waveguide exhibited very low optical propagation losses of 0.30dB/cm and 0.36dB/cm at the wavelengths of 1.31μm and 0.85μm, respectively. [DOI: 10.1143/JJAP.41.1379]

• 社団法人応用物理学会の論文
• 2002-03-15

著者

• SHIODA Tsuyoshi

  Functional Materials Laboratory, Mitsui Chemicals. Inc.

• Shioda T

  Functional Materials Laboratory Mitsui Chemicals. Inc.

• Shioda Tsuyoshi

  Functional Materials Laboratory Mitsui Chemicals Inc.

関連論文

• Influence of Water Sorption on Fluorinated Polyimide Waveguide
• Polarization Dependence of Mach-Zehnder Interferometer Switch Using Fluorinated Polyimide Waveguide
• Fluorinated Polyimide Waveguide Fabricated Using Replication Process with Antisticking Layer
• Replication of Fluorinated Polyimide Film Using Quartz Glass Mold : Instrumentation, Measurement, and Fabrication Technology
• Polarization Dependence of Mach-Zehnder Interferometer Switch Using Fluorinated Polyimide Waveguide

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