Fabrication of High-Quality YBa_2Cu_3O_<7-δ> Multilayer Structure Using Chemical Mechanical Planarization for Superconducting Quantum Interference Device Gradiometer

概要

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We have developed a technology to fabricate a YBa_2Cu_3O_<7-δ> (YBCO) multilayer structure of high quality using chemical mechanical planarization (CMP) for the end of fabricating a high-performance superconducting quantum interference devices (SQUIDs) gradiometer. An annealing process in oxygen gas atmosphere was introduced to achieve epitaxial growth of upper films. A double-cross structure on five layers, YBCO/SrTiO_3 (STO)/YBCO/STO/YBCO, was fabricated to show the performance. The insulation resistivity between layers at 77 K, T_c and J_c of each layer at 77 K were more than 1.5×10^7 Ω・cm, over 88 K and more than 10^6 A/cm^2, respectively. The possibility of fabricating grain boundary Josephson junctions on the top layer with a bicrystal substrate is investigated using STO (100) bicrystal substrates with 24 and 30 degrees misorientation angles on a YBCO trilayer structure. The I_cR_n products of both junctions were the same as that of a single YBCO layer.
社団法人応用物理学会の論文
2002-10-01