Nanometer-Scale Surface Modification Using Scanning Tunneling Microscope (STM)-Based Lithography with Conductive Layer on Resist
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-15
著者
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Yonei K
Shibaura Inst. Technol. Tokyo Jpn
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Yonei Kenji
Department Of Electronic Engineering Shibaura Institute Of Technology
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OHTSUKA Kenichi
Department of Electronic Engineering, Shibaura Institute of Technology
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Ohtsuka Kenichi
Department Of Electronic Engineering Shibaura Institute Of Technology
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- Difference in Diffusion Length of Ga Atoms under As_2 and As_4 Flux in Molecular Beam Epitaxy
- Nanometer-Scale Surface Modification Using Scanning Tunneling Microscope (STM)-Based Lithography with Conductive Layer on Resist
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