Properties of Ruthenia-Based Resistors Embedded in Low-Temperature Co-Firable Ceramic Substrates
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概要
- 論文の詳細を見る
Commercial thick-film resistor pastes were printed on and embedded in cordierite + borosilicate glass low-temperature co-firable ceramic (LTCC) substrates. The electrical properties of the resistors were found to depend on the final microstructure. Anorthite crystals were produced by the interaction between the substrates and glass composition of the resistor films at boundaries. The anorthite crystals grown into the substrate and the resistor layer increased the overall resistance. Sedimentation of the conductive particles and glass migrating to the substrates decreased the resistor thickness during sintering. Conductive particles in the resistor films flocculated after firing at 8500 and 900℃. Formation of anorthite crystals, conductive particle sedimentation, glass migration, and inter-diffusion were determined to be three major factors determining film resistivity
- 社団法人応用物理学会の論文
- 2002-08-15
著者
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HSI Chi-Shiung
Department of Materials Science and Engineering I-Shou University
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Lee Ming-wei
Department Of Chemical Engineering National Taiwan University
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Lee Ming-wei
Department Of Materials Science And Engineering I-shou University
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Hsi Chi-Shiung
Department of Materials Engineering, I-Show University
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