Structural and Morphological Evolution Emerging in Si Surface Layers upon High-Current Tb-Ion Implantation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-05-15
著者
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Liu Bai
Laboratory Of Advanced Materials Department Of Materials Science And Engineering Tsinghua University
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Cheng X
Advanced Materials Laboratory Department Of Materials Science And Engineering Tsinghua University
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Cheng Xiang
Laboratory Of Cardiovascular Immunology Institute Of Cardiology Union Hospital Tongji Medical Colleg
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Cheng Xiang
Laboratory Of Advanced Materials Department Of Materials Science And Engineering Tsinghua University
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LIU Bai
Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University
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- Structural and Morphological Evolution Emerging in Si Surface Layers upon High-Current Tb-Ion Implantation