Crystal Structure of Oxygen/Nitrogen-Doped GeSbTe Phase-Change Media : Investigation Using Grazing Incidence X-ray Diffraction (Short Note)

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概要

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• The effects of oxygen- and nitrogen-dopings on the crystal structure of GeSbTe recording layers of phase-change media were studied by X-ray diffraction. A high resolution grazing incidence X-ray diffraction optics using a laboratory X-ray source was developed to quantitatively analyze the crystal structure of thin film materials. Lattice parameter, crystallite size, and lattice strain were determined from diffraction profiles. [DOI: 10.1143/JJAP.41.2189]

• 社団法人応用物理学会の論文
• 2002-04-15

著者

• Takase A

  Application Laboratory Rigaku Corporation

• Takase Aya

  Application Laboratory Rigaku Corporation

• Fujinawa Go

  Application Laboratory Rigaku Corporation

• Sugiyama Ikuto

  Recording Media Research Laboratory Teijin Limited

• EBINA Atsushi

  Technical & Development Section, Recording Media Mihara Factory, Teijin Limited

• HIRASAKA Masao

  Polymer Research Center, Teijin Limited

• Sugiyama Ikuto

  Recording Media Division Teijin Limited

• Hirasaka Masao

  Polymer Research Center Teijin Limited

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• Crystal Structure of Oxygen/Nitrogen-Doped GeSbTe Phase-Change Media : Investigation Using Grazing Incidence X-ray Diffraction (Short Note)
• Improvements of Resolution and Surface Roughness using Alkaline Treatment of Photoresist Surface in High-Density Optical Disk Mastering
• Effect of ZnS Adhesion Layer on Overwrite Cyclability of Phase Change Optical Recording Media

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