Characterization of Secondary Phases in Lead Zirconate Titanate Film Surface Deposited with Excess Lead Content

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概要

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• The characterization of secondary phases in lead zirconate titanate (PZT) film surface deposited with excess lead content has been carried out using high-voltage transmission electron microscopy. The high-resolution transmission electron microscopy images indicate that the PZT surface was largely covered with the Pb-rich amorphous phase and a small amount of pyrochlore phase among the PZT grains. The particle size of pyrochlore phase is about 2.5-3nm. The Pb-rich PZT surface in Auger electron spectroscopy depth profile seems to be attributed to the existence of the Pb-rich amorphous phase, which is likely to PbO. [DOI: 10.1143/JJAP.41.1519]

• 社団法人応用物理学会の論文
• 2002-03-15

著者

• Park Gyeong-su

  Analytical Engineering And Microelectronics Lab. Samsung Advanced Institute Of Technology

• CHUNG II-Sub

  Analytical Engineering and Microelectronics Lab., Samsung Advanced Institute of Technology

• Chung Ii-sub

  Analytical Engineering And Microelectronics Lab. Samsung Advanced Institute Of Technology

• Chung Il-Sub

  Analytical Engineering and Microelectronics Lab., Samsung Advanced Institute of Technology

関連論文

• Analysis of magnetic microstructure in MRAM bits by electron holography and Lorentz microscopy
• Characterization of Secondary Phases in Lead Zirconate Titanate Film Surface Deposited with Excess Lead Content

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