磁気支持スライダにおけるセンサ故障診断(機械力学,計測,自動制御)

概要

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While magnetically suspended sliders controlled under five degrees of freedom have been used as a linear guide system for wafer transportation in clean atmosphere, three degrees of freedom controlled sliders may be applied to suspensory equipments which can move on a ceiling board without an effect of friction. Hence, using this slider with a propeller, a transportation system without a track can be constructed. In this paper, sensor fault diagnostics using an observer for magnetically suspended sliders is discussed and the design method for the dead beat observer which can maintain stability in replacement of outputs caused by isolation of a faulty sensor is proposed. In experiments, disturbance signals are added to a displacement sensor and the responses are measured. Sensor faults are successfully detected and isolated by the designed diagnostic system'for various disturbances.
一般社団法人日本機械学会の論文
2004-04-25