Effect of Purge Gas on the Reliability of a 266nm Continuous-Wave Solid-State Laser(Lasers, Quantum Electronics)

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概要

• 論文の詳細を見る

• The reliability of a 266 nm cw (continuous-wave) solid-state laser under the influence of purge gas was considered. Scatterers on a mirror during long-term operation were ammonium sulfate (NH_4SO_4). The synthesis of ammonium sulfate was related to the amount of water in the purge gas. UV power decreased by scatterers when the purge was not conducted.

• 社団法人電子情報通信学会の論文
• 2004-12-01

著者

• Kubota Shigeo

  Sony Co.

• Wada Hiroyuki

  Sony Co.

• Oka Michio

  Sony Co.

• Tatsuki K

  Sony Co.

• TATSUKI Koichi

  SONY Co.

• SAITO Masaki

  SONY Co.

関連論文

• Effect of Purge Gas on the Reliability of a 266nm Continuous-Wave Solid-State Laser(Lasers, Quantum Electronics)
• Performance and Reliability Improvement of HfSiON Field-Effect Transistor with Low Hafnium Concentration Cap Layer Formed by Metal Organic Chemical Vapor Deposition with Diethylsilane
• Measurement and Analysis of Cavity Loss of a 266 nm Continuous-Wave Solid-State Laser

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