C-3-71 Optical MEMS pressure sensor based on Fabry-Perot interferometry
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概要
- 論文の詳細を見る
- 社団法人電子情報通信学会の論文
- 2006-03-08
著者
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LI Ming
Department of Chemistry, Kyungpook National University
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Li Hongpu
Department Of Electrical And Electronic Engineering Shizuoka University
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Li Hongpu
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shizuoka University
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Li Ming
Department Of Electrical And Electronic Engineering Shizuoka University
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Ogusu Kazuhiko
Department of Electrical and Electronic Engineering, Shizuoka University
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Wang Ming
Jiangsu Province Opto-electronic Technology Key Lab, Nanjing Normal University
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Ogusu Kazuhiko
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shizuoka University
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Li Ming
Department Of Bioproductive Science Faculty Of Agriculture Utsunomiya University
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Wang Ming
Jiangsu Province Opto-electronic Technology Key Lab Nanjing Normal University
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Wang Ming
Jiangsu Key Laboratory on Optoelectronic Technology, School of Physical Science and Technology, Nanjing Normal University, Nanjing 210097, P. R. China
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Li Ming
Department of Anatomy & Neurobiology, School of Basic Medicine, Central South University
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