CSW-14: High-rate Synthesis of Diamond-like Carbon Films by Bipolar Nanopulse Chemical Vapor Deposition Method(CSW-III: COATING, SURFACE MODIFICATION AND WEAR)

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概要

• 論文の詳細を見る
• 一般社団法人日本機械学会の論文
• 2005-06-19

著者

• Ohtake N.

  Tokyo Institute Of Technology

• SAITO T.

  NGK Insulators, LTD.

• KONDO Y.

  NGK Insulators, LTD.

• TERAZAWA T.

  NGK Insulators, LTD.

• Terazawa T.

  Ngk Insulators Ltd.

関連論文

• CSW-14: High-rate Synthesis of Diamond-like Carbon Films by Bipolar Nanopulse Chemical Vapor Deposition Method(CSW-III: COATING, SURFACE MODIFICATION AND WEAR)
• CSW-13: Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure(CSW-III: COATING, SURFACE MODIFICATION AND WEAR)
• CSW-06: Preparation of Amorphous Carbon Films from Radical Species Using Surface Wave Plasma(CSW-II: COATING, SURFACE MODIFICATION AND WEAR)
• CSW-08: Wear Resistance of Segment-structured DLC Films under Large Tensile Strain Conditions(CSW-II: COATING, SURFACE MODIFICATION AND WEAR)

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