CSW-13: Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure(CSW-III: COATING, SURFACE MODIFICATION AND WEAR)
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概要
- 論文の詳細を見る
- 一般社団法人日本機械学会の論文
- 2005-06-19
著者
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SAITO M.
Tokyo Med.Dental Univ.
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Ohtake N.
Tokyo Institute Of Technology
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SAITO T.
NGK Insulators, LTD.
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KONDO Y.
NGK Insulators, LTD.
関連論文
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- CSW-14: High-rate Synthesis of Diamond-like Carbon Films by Bipolar Nanopulse Chemical Vapor Deposition Method(CSW-III: COATING, SURFACE MODIFICATION AND WEAR)
- CSW-13: Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure(CSW-III: COATING, SURFACE MODIFICATION AND WEAR)
- CSW-06: Preparation of Amorphous Carbon Films from Radical Species Using Surface Wave Plasma(CSW-II: COATING, SURFACE MODIFICATION AND WEAR)
- CSW-08: Wear Resistance of Segment-structured DLC Films under Large Tensile Strain Conditions(CSW-II: COATING, SURFACE MODIFICATION AND WEAR)