NTM-03: Fabrication of Spiral Micro-Coil Utilizing LIGA Process(NTM-I: NON TRADITIONAL MANUFACTURING PROCESS)

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概要

• 論文の詳細を見る
• 一般社団法人日本機械学会の論文
• 2005-06-19

著者

• Kusumi S.

  Ssm Co. Ltd.

• SHIMADA O.

  SSM Co., Ltd.

• MEKARU H.

  University of Hyogo

• SATO N.

  Juken Kogyo Co., Ltd.

• SHIMIZU M.

  Juken Kogyo Co., Ltd.

• YAMASHITA M.

  Hyogo Prefectural Institute of Technology

• HATTORI T.

  University of Hyogo

関連論文

• NTM-03: Fabrication of Spiral Micro-Coil Utilizing LIGA Process(NTM-I: NON TRADITIONAL MANUFACTURING PROCESS)
• P6: Precise Micro Pattern Replication by Hot Embossing(SHORT ORAL PRESENTATION FOR POSTERS I)
• P9: Investigation of High Strength Electroformed Ni for Microprobes(SHORT ORAL PRESENTATION FOR POSTERS I)
• ICS-12: Bonding Dissimilar Materials by Exposure to an H_2O Ion Beam(ICS-II: INTERFACES AND CONTACT SURFACE MECHANICS)

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