2262 超音波スペクトロマイクロスコピーによるボールSAWデバイスの簡便な異方性評価法(S26-4 非破壊評価とモニタリング(4),S26 非破壊評価とモニタリング)

概要

論文の詳細を見る
An ultrasonic micro-spectroscopy (UMS) technique based on reflection coefficient measurements at a small surface area has been applied to the anisotropy evaluation of spherical single crystals employed for ball surface acoustic wave (SAW) devices. A simplified method utilizing the azimuthal angle dependence of the amplitude or phase of reflection coefficients is proposed and applied to two kinds of spherical single crystals, SiO(0001) and LiNbO3(0001), of 10mm in diameter. It has been found that relative errors in determining the crystal orientation by the proposed method are less than one degree. Thus, it has been demonstrated that the simple method using UMS could be a useful tool for quantitatively evaluating the anisotropy of small spherical crystals.
一般社団法人日本機械学会の論文
2005-09-18