543 空気超音波による表面粗さの非接触モニタリング(OS 非破壊評価とモニタリング(3))

概要

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Surface roughness is an important parameter to evaluate surface characteristics of materials and is normally measured with the stylus or the optical scattering methods. This paper presents an ultrasonic roughness measurement using an air-coupled ultrasound. An experiment has been conducted using broadband air-coupled capacitance transducers, with specimens having root mean square roughness Rq ranged from 0.04μm to 244μm. The scattered waves from the specimens were measured in the specular and non-specular reflection configurations and the relationships between roughness and the amplitudes of both coherent and incoherent components of the scattered waves are investigated. The relationship between incoherent component and a lateral parameter of surface profile is also examined. The results show that the amplitude of coherent component significantly increases with the surfaces roughness and on the contrary the amplitude of the incoherent component is slightly decreased with the roughness.
2004-11-05