913 PDP保護膜材料開発に関する研究(GS-4,16 薄膜(1),研究発表講演)

概要

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Since Alternating current plasma display panel (ac PDPs) was introduced into the market in 1990's, the protective layer is one of key factor of ac PDPs performance. The main roles of the protective layer in acPDPs are, to protect electrodes from the ion bombardment and to supply secondary electrons to the discharge space, high durability, high insulation, high transparency, and high ion-induced secondary electron emissivity are required to protective layer^<[1,2,3]> MgO has been used for the protective layer And the improvement of the deposition condition and the composite materials based on MgO or other Alkaline earth metal oxides were investigated in order to obtain better feature for the protective layer^<[4]> In this investigation, ZnO was selected as the additives. MgO composites were deposited on the Si and the carbon substrate by electron beam deposition method The surfaces were characterized by Atomic Force Microscopy secondary (AFM) and electron emissivity (γ) of the films were investigated by the secondary electron emission analyzer. The composition of the films was measured using Rutherford backscattering spectroscopy(RBS).
一般社団法人日本機械学会の論文
2005-03-18