Fabrication of Ni-W Electroplated Micro Diamond Grinding Tools and Their Application to Grooving in Silicon(M^4 processes and micro-manufacturing for science (continued))

スポンサーリンク

概要

• 論文の詳細を見る

• Ni-W electroplated micro diamond grinding tools with cylindrical carbide substrate having a diameter of 100μm were fabricated in ammonium citrate bath. In a fabrication of the Ni-W electroplated micro diamond tools, the effect of stirring the electroplated liquid on the abrasive grain distribution was investigated. Furthermore, the tool life in machining of the single crystalline silicon with the electroplated tools was examined.

• 2005-10-18

著者

• ONIKURA Hiromichi

  Kyushu University

• Ohnishi Osamu

  Kyushu University

• Nishihara Kunio

  Kyushu Polytechnic College

関連論文

• Fabrication of Ni-W Electroplated Micro Diamond Grinding Tools and Their Application to Grooving in Silicon(M^4 processes and micro-manufacturing for science (continued))
• Automatic Drill Wear Measurement Using Colour Image Processing
• Study on Skiving Process : Cutting Force and Workpiece Deflection
• Study on Skiving Process : Surface Accuracy
• Effects of Atmosphere and Ultraviolet Light Irradiation on Chemical Mechanical Polishing Characteristics of SiC Wafers

スポンサーリンク